摘要
以Fe粉、Ni粉和Co粉为原料,研究了利用注射成形技术生产Kovar合金封装盒体的工艺。选择了一种蜡基多聚物粘结剂体系,在粉末装载量为58%时,喂料的最佳注射参数是:温度160~170℃,压力90~120MPa。以喂料的热分析结果为指导,制定出合理的热脱脂工艺,对于6mm×6mm×50mm的注射坯,总共脱脂时间约为18h。将脱脂坯在1300℃烧结后,材料的致密度可达8.06g.cm-3,热膨胀系数在(4.5~6.0)×10-6K-1之间(25~450℃),所制备的封装盒体的气密性小于1.2×10-9Pa.m3.s-1。
Package boxes of Kovar alloy were fabricated by powder injection molding process starting with powders of Fe, Ni, Co, and a wax-based polymer was selected as binders. When the powder loading was 58%(volume fraction), the optimal injection parameters were: injection temperature 160～170 ℃, injection pressure 90～120 MPa. Based on the thermal analysis of the feedings, a suitable thermal decomposing process was set up. The whole decomposing process needed about 18 hours for 6 mm×6 mm×50 mm green bars. After being sintered at 1300 ℃ for 2 hours, the boxes with density of 8.06 g/cm^3, average thermal expansion coefficient of (4.5～6.0)×10^(-6) K^(-1)(25～450 ℃), leakage rate lower than 1.2×10^(-9) Pa·m^3·s^(-1) could be produced.
出处
《真空电子技术》
2005年第4期37-40,共4页
Vacuum Electronics
基金
国家杰出青年科学基金(50025412)
国家重点基础研究发展规划(G2000067203)资助课题。
关键词
Kovar合金
注射成形
热膨胀系数
气密性
Kovar alloy
Powder injection molding
Thermal expansion coefficient
Leakage rate
