分子动力学在研究激光蚀除机制中的应用进展

Advances in the Study of Laser Ablation Mechanisms by Molecular Dynamics Method

介绍了分子动力学模拟的基本原理,并对国内外采用其研究金属、半导体、有机体等材料的激光蚀除机制的现状以及所涉及的关键技术进行了详尽的综述,最后指出了分子动力学模拟激光蚀除的进一步研究方向。

The basic principle of molecular dynamics simulation is described, and then a review of the recent oversea as well as internal research on the mechanisms of laser ablation of metals, semiconductor as well as organic solids etc. and the involved key techniques are summarized in detail. Some directions of further research on molecular dynamics simulation of laser ablation are indicated.