微细加工平台特性研究

Study on Characteristics of Microfabrication Technology Stage

通过对不同结构的微细加工平台的分析,指出采用Halbach磁阵和螺线管结构研制的微细加工平台的磁场特性比较复杂,难于建模和控制.提出了新型微细加工平台,并对它产生的磁通密度纹波进行了分析,提出以磁通纹波和驱动力为优化目的的二次序列法优化,优化结果表明,磁通纹波减小了30%,驱动力增加了10%.仿真结果表明,该系统有较好的频带宽(0～8 kHz).

Analyzing the different microfabrication technology stages-Halbach magnet array and solenoid construction type, it is shown that their magnetic fields are more complex and difficult to be modeled and controlled. A novel microfabrication technology stage is developed and its magnetic flux density ripple has been analyzed. The quadratic programming is proposed to optimize the design, using the flux density ripple and driving force as the objects of optimization. The optimized results show that the flux density ripple is decreased by 30% and the force is increased by 10%. The simulation demonstrates the system has a broad frequency band 0~8 kHz.