大量程光纤干涉测距中的三级量程倍增技术

Three Stage Measuring Range Multiplication Technology for Large Range Distance Measurement by Using Optical Fiber Interference

利用光纤准白光干涉原理,引入光学倍增、光纤组倍增及光开关倍增的三级级联结构,采用200mm短扫描导轨达到了大于12m的绝对测距,并利用系统自身特点巧妙地对倍增光纤组及光开关的光纤光程差进行自标定,实现了光波长基准的传递;对精度作了简要分析。实验结果表明:该系统长时间重复性精度优于1μm,测量的相对精度优于10-5。

The cascade configuration of optical multiplication, fiber group multiplication and optical switch multiplication was introduced based on the principle of optical fiber quasi-white light interference. Absolute measurement of a distance more than 12 m is achieved by using a 200 mm short-scanning guide. Utilizing the characteristics of system itself, optical path difference of multiple optical fiber groups and optical switch is ingeniously self-calibrated, therefore the light wavelength reference is transmitted. Moreover, the precision of this measuring system was briefly analyzed. According to the data of experiments, this system's long time repeatability is less than 1 μm and measuring relative accuracy is less than 10-5.