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驱动信号与微波信号物理隔离的RF MEMS开关的研究 被引量：2

RF MEMS Switches with Bias Physically Insulated from Microwave Signals
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摘要 针对MEMS开关在宽带应用时遇到的驱动信号与微波信号间的干扰问题,论述了驱动信号与微波信号物理隔离的多种开关的设计,分析了4种结构形式的MEMS开关,使用IntelliSuite○R软件进行开关机电耦合分析。在开关总的结构尺寸确定的前提下,使用ADS/Momentum场分析软件,微调膜桥和梁的结构参数,通过通孔接地实现微带线与CPWG信号的连接,通过驱动电极的结构和连接方式及与微波信号线间隙的调整,实现了MEMS开关整体性能的优化。 Four kinds of MEMS switches were present, with bias electrodes physically insulated from RF/microwave transmission line, which were designed for lower crosstalk between bias and microwave signals. The mechanical structure of these switches was optimized by electromechanical coupling analysis of IntelliSuite(r) software. The RF/microwave performances of these switches were optimized by 2.5 dimensional electromagnetic (EM) field-solvers of ADS/Momentum. The optimized design consists of fine tuning structural parameters and adjusting the bias electrodes.
作者 朱健 郁元卫 陆乐 贾世星 张龙 周百令
机构地区 东南大学 南京电子器件研究所
出处 《中国机械工程》 EI CAS CSCD 北大核心 2005年第14期1254-1258,共5页 China Mechanical Engineering
基金 国防科技重点实验室基金资助重点项目(51485020603DZ6502)
关键词 MEMS开关 隔离 机电耦合 电磁场 MEMS switch physically insulation electromechanical coupling EM field
分类号 TN405 [电子电信—微电子学与固体电子学]
  • 相关文献

参考文献6

  • 1Rebeiz G M, Muldavin J B. RF MEMS Switches and Switch Circuits. IEEE Microwave Magazine,2001,2(4) : 59 ～ 71
  • 2朱健,林金庭,林立强.DCDC—20GHz射频MEMS开关(英文)[J].Journal of Semiconductors,2001,22(6):706-709. 被引量：10
  • 3朱健,周百令,郁元卫,陆乐,贾世星,张龙.高隔离度S波段MEMS膜桥开关[J].固体电子学研究与进展,2004,24(1):64-67. 被引量：5
  • 4.低温表面牺牲层工艺[EB/OL].http://www.nedi.cn,2005.
  • 5朱健 陈辰 林立强.RF MEMS开关的优化设计[J].压电与声光,2001,23(5):179-181.
  • 6Zhu J, Zhou B, Yu Y, et al. DC-contact RF MEMS Switches with Bias Physically Insulated from RF Signal. IEEE International Conference on Solid-State and Integrated- Circuit Technology (ICSICT) ,Beijing, 2004

二级参考文献10

  • 1Muldavin J B, Rebeiz G M. High isolation MEMS shunt switches-part 2: design. IEEE Transactions on Microwave Theory and Techniques, 2000 . 48 (6) : 1 053-1 056.
  • 2Muldavin J B, Rebeiz G M. High isolation MEMS shunt switches-part 1: modeling. IEEE Transactions on Microwave Theory and Techniques, 2000; 48 (6) :1 045-1 052.
  • 3Rebeiz G M, Muldavin J B. RF MEMS switches and switch circuits. IEEE Microwave Magazine. 2001;2(4):59-71.
  • 4Yao Zjamie，IEEE J Microelectromechan Systems，1999年，8卷，2期，129—134页
  • 5Osterberg P，Proc MEMS'94，1994年，28—32页
  • 6Rebeiz G M, Muldavin J B. RF MEMS switches and switch circuits. IEEE Microwave Magazine, 2001;2(4):59-71
  • 7Muldavin J B, Rebeiz G M. High isolation MEMS shunt switches-part 1: modeling. IEEE Transactions on Microwave Theory and Techniques, 2000; 48 (66):1 045-1 052
  • 8Muldavin J B, Rebeiz G M. High isolation MEMS shunt switches-part 2: design. IEEE Transactions on Microwave Theory and Techniques, 2000 ; 48 (6): 1 053- 1 056
  • 9朱健 陈辰 林立强.RF MEMS开关的优化设计[J].压电与声光,2001,23(5):179-181.
  • 10朱健,林金庭,林立强.DCDC—20GHz射频MEMS开关(英文)[J].Journal of Semiconductors,2001,22(6):706-709. 被引量：10

共引文献12

同被引文献16

  • 1韩琳,刘兴明,刘理天.用于红外探测的掺硼非晶硅薄膜电阻的热电特性研究[J].半导体光电,2006,27(2):177-180. 被引量：3
  • 2Rijks T G S M, van Beck J T M, Steeneken P G, et al. MEMS tunable capacitors and switches for RF applications[C]//Proc Int Conf Microelectronics. Nis, Serbia, 2004: 49 - 56.
  • 3Brown E R. RF-MEMS switches for reconfigurable integrated circuits[J]. IEEE Trans on Microwave Theory and Techniques, 1998, 46(11): 1968- 1880.
  • 4Rebeiz G M. RF MEMS, Theory, Design and Technology [M]. New Jersey: John Wiley & Sons Ltd, 2002.
  • 5Maciel J J, Slocum J F, Smith J K, et al. MEMS electronically steerable antennas for fire control radars [C]//Proceedings of IEEE 2007 Radar Conference. Waltham, MA, United States, 2007:677-682.
  • 6Lee K K, Kim B C. RF MEMS switch for wireless LAN applications [C]//Proceedings International Conference on MEMS, NANO and Smart Systems. Banff, Alta, Canada, 2003: 100-102.
  • 7Majumder S, Lampen J, Morrison R, et al. A packaged, high-lifetime ohmic MEMS RF switch[C]//IEEE MTT-S International Microwave Symposium Digest. Philadelphia, PA, United States, 2003:1935 - 1938.
  • 8Dyck C W, Plut T A, Nordquist C D, et al. Fabrication and characterization of ohmic contacting RF MEMS switches[C]//Proc SPIE--International Society for Optical Eng. San Jose, CA, United States, 2004:79 - 88.
  • 9Rebeiz G M,Muldavin J B,RF MEMS Switches and Switch Circuits[J].IEEE Microwave Magazine,2001,2(4):59-71.
  • 10Rebeiz G M,RF MEMS:Theory,Design,and Technology[M].New Jersey:John Wiley & Sons,Inc.,January 2003.

引证文献2

二级引证文献5

中国机械工程
2005年 第14期

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