摘要
针对含复杂结构的MEMS器件,提出基于异构宏模型的系统级建模方法,即将基于解析法和基于数值计算的宏建模方法结合起来提取复杂器件的参数化宏模型,在此基础上实现MEMS系统级仿真。以z轴加速度计为例,在Saber中进行其系统级的时域、频域仿真,将仿真结果与有限元分析进行了比较,其仿真时间小于3min,相对误差小于3%,表明该方法能够快速有效地实现复杂结构MEMS器件的系统级仿真。
System-level modeling method based on hybrid macromodels was proposed for rapid modeling and simulation of MEMS devices with complex structures. This method was to combine analytical-method based macromodel and numerical-method based macromodel in a simulator to describe the characteristics of MEMS devices. As a demonstration, the system-level model of a z-axis accelerometer was established using this method and was simulated in SABER. Simulation results show that the modal frequency obtained by the method is agree well with that by finite element analysis (error less than 3%), and that the method is effective for rapidly performing system-level time-domain simulation.
出处
《中国机械工程》
EI
CAS
CSCD
北大核心
2005年第14期1272-1275,共4页
China Mechanical Engineering
基金
国家自然科学基金资助项目(50375125)
高等学校博士学科点专项科研基金资助项目(2003069903
20040699009)
关键词
异构宏模型
系统级建模
微机电系统
仿真
hybrid macromodel
system-level modeling method
MEMS
simulation
