电化学微细加工监控系统的研究

Research on electrochemical micromachining monitor system

在虚拟仪器软件平台上研制了电化学微细加工监控系统,系统采用霍尔电流传感器采集加工电流,并实时准确显示过程数据曲线,根据电流突变快速响应,系统的定位精度和重复定位精度均小于5μm。和传统电化学加工控制系统相比,具有硬件简单、灵活性好、性价比高、稳定可靠等特点。

The electrochemical micromachining (EMM) monitor system is developed based on the virtual instrument software platform-LabVIEW.The Hall current sensor is used to collect the real-time machining current,and the process data curves are displayed real-timely and dynamically to show the rapid response of the current break.The positioning accuracy and the repetitive positioning accuracy is less than 5μm.Compared with the common EMM control system,it owns the advantages such as simple circuit of hardware,flexibility,high cost performance and good reliability.