MEMS高g值加速度计力学分析

Mechanics analysis of MEMS high g accelerometer

运用有限元软件ANSYS并结合刚度矩阵算法对一种高g值加速度计结构进行了应力分析和模态分析,得到了在50000gn值的冲击下加速度计的应力、最大位移、模态响应,表明该结构能够在高冲击环境下安全工作。

With ANSYS,a finit element analysis software and the rigidity matrix arithmetic,the stress analysis and the mode analysis of a MEMS high g accelerometer structure are performed.The stress,the maximum displacement and the mode response of the accelerometer are calculated under the 50000g_n impact environment.The result indicates that the accelerometer can work in high shock environment.