n+n组合结构半导体丙酮气敏元件研究

Study on n+n combined structure semiconductor acetone gas sensing element

n+n组合结构半导体气敏元件是基于气敏元件互补反馈原理的一种新结构半导体气敏元件。该元件是由2种传导类型相同的敏感体A和B构成,A和B都是n型半导体材料。理论分析表明当敏感体A和B满足一定条件时,该元件具有高的选择性,同时,还具有好的热稳定性和高的灵敏度。通过试验,获得了性能较好的n+n组合结构丙酮气敏元件。

n+n structure semiconductor gas sensing element based on the compensation-feedback principle is a new type gas sensing element.The sensing element is composed of two sensitive materials A and B whose conductive types are the same.The materials A and B are all n-type materials.The results analyzed from a theoretical viewpoint show that the sensing element has higher selectivity,better thermal-stability and high sensitivity when the materials A and B satisfy certain conditions.Through testing the characteristics of the combined structure semiconductor gas sensing element,the perfect n+n combined structure acetone gas sensing element is fabricated .