软X射线多层膜透射式起偏器和检偏器设计

Design of Transmission Multilayer Polarizers and Analyzers in Soft X-Ray Range

叙述了软X射线波段多层膜透射式起偏器和检偏器的设计原理,提出了设计准则,通过该准则设计的多层膜偏振元件能够同时满足具有较大的光通量和偏振度要求.同时还优化了不同膜厚比情况下软X射线多层膜偏振元件的性能,讨论了在多层膜制作过程中,由于表界面粗糙度和扩散的不同对元件性能的影响,这些工作为制作软X射线多层膜透射式起偏器和检偏器提供了设计基础.

In this paper,the principles of designing transmitted multilayer polarizers and analyzers in soft X-ray range were represented and a criterion of choosing the periodic number and periodic thickness of the transmitted multilayer polarizers and analyzers was given,and the designed transmitted multiplayer analyzers by the criteri- on could meet the requirements of having the big throughput and big polarization.At the same time,the perfor- mance of transmitted multilayer analyzers for different ratio of the thicknesses was optimized.And the influence of the optical properties of the transmitted multilayer analyzers by different interfacial roughness and different interfacial diffusion in the process of the multilayer fabrication are discussed.These work can become the design basis of the manufacture of the transmitted multilayer polarizers and analyzers in soft X-ray range.