摘要
波长计要求导轨运行平稳,直线性好。导轨采用音圈电机拖动。音圈电机结构简单、维护方便、响应速度快。依据等效力学模型和等效电路模型,得到音圈电机位移-电压传递函数。采用PID调节器,实现音圈电机的稳速控制,满足波长计的运动要求。
Wavemeter requires that the guide can move in uniform motion and along straight line.The guide is driven by voice-coil motor that have simple structure,is easily maintained and rapidly responses.According to equivalent mechanical model and circuit model,the displacement-voltage transfer function of voice-coil motor.With PID regulator,the guide can move in steady speed state,which meet demands of the wavemeter.
出处
《电子工艺技术》
2005年第4期225-227,231,共4页
Electronics Process Technology
基金
国家自然科学基金资助项目(No.60490280)。
关键词
迈克尔逊干涉
音圈电机
传递函数
PID
稳速
<Keyword>Michelson interference
Voice-coil motor
Transfer function
PID
Uniform motion