高压开关管排气台的研制

Research and devolopment of exhaust system for high-voltage switching tube

由机械泵为前级泵,分子泵为主抽泵构成高真空系统,对高压开关管进行真空排气;由温度控制仪程序控制烘箱的升温和保温;通过充气系统对高压开关管进行充/放气来调节管内压力;用“高压开关管测试电源”进行“高压开关管”的高压动态老炼和性能检测。高压开关管排气台为多工位结构;空载时极限真空度优于5×10-6Pa;烘烤温度为室温~600℃,连续可调,恒温精度优于±1%。

In the multistation exhaust system a mechanic pump is used as the backing pump and molecular pump as the main integral part to form a high vacuum system. A temperature programmed controller is used to control the temperature rising and holding in drying oven. The high-voltage switching tube will be controlled by an air charging system to regulate the air pressure within the tube through charging or discharging. A special power supply for testing the high-voltage switching tube is provided for dynamic ageing test and performance test. In the exhaust system the no-load ultimate vacuum pressure is lower than 5×10^(-6)Pa and the drying temperature is from room temperature to 600℃ and continuously adjustable, with a thermostatic accuracy higher than ±1%.