HF-PCVD法TiO_2纳米晶的粒径与晶型控制

Control of Particle Size and Crystal Phase of TiO_2 Nanocrystalline Prepared by HF-PCVD

以TiCl4和O2为反应体系,采用高频等离子化学气相沉积(HF-PCVD)法制备了晶化完整的锐钛和金红石混晶型TiO2纳米晶,球形体的晶粒分散性良好,分布较为均匀;研究了控制粒径大小和晶相组成的关键反应条件。XPS,TEM,XRD结果显示:增加TiCl4进料量、延长停留时间均利于锐钛相向金红石相转化,但粒径有所增大;添加AlCl3使金红石相含量较未掺杂时有较大幅度提高,且粒径随掺铝量增加而减小。本实验条件下,TiO2纳米晶的粒径为25nm^60nm,金红石相含量在12.0%~53.6%间可控。

Taking TiCl4 and O-2 as reaction system, TiO2 nanocrystallines were prepared by High Frequency Plasma Chemical Vapor Deposition, of which they were a mixture of anatase and rutile and fully-crystallized, the spherical particles were well-distributed. The key reaction conditions of controlling the particle size and crystal phase were discussed. XPS, TEM, XRD results showed that the rutile content in TiO2 particles increased with the increasing of TiCl4 feeding rates and protracting residence time, but the average particle size increased. The addition of AlCl3 influenced the form of TiO2 particles considerably, the particle size was reduced and the phase transformation was promoted to enhance the rutile content at the same time. In our experiments, the mean particle size is in the range from 25nm to 60nm and the content of rutile can be controlled from 12.0% to 53.6%.