摘要
微机电系统(M EM S)以飞快的速度发展成为一个集微型机械、微传感器、微能源、微致动器、微控制器、微执行器、信号处理和智能控制于一体的新兴研究领域。微机电系统结构的复杂性促进了微装配技术的蓬勃发展,吸引了大批国内外研究人员对其进行广泛研究。本文首先分析了微器件装配技术对微机电系统的重要性及其产生的深远影响,然后介绍了近年来国内微装配技术的发展现状和参与微装配项目研发的研究单位的一些有应用价值的研究成果,最后阐述了微装配系统的发展趋势。
Along with the development of MEMS,micro-assembly technology is developing rapidly in recent years,a large number of researchers of the world are gradually realizing the great significance of the study of micro-assembly and micro manipulation technology.The significance of studying micro-assembly and its far influence on MEMS are analized,then the current status in the development of micro-assembly and some important research results from several research institutions participating in micro-assembly are introduced.Finally,some future prospects of micro-assembly are presented.
出处
《光机电信息》
2005年第7期13-18,共6页
OME Information
关键词
微装配
微机电系统
微操作
Micro-assembly
MEMS (Micro-Electro-Mechanical System)
micro manipulation
