摘要
首先介绍了PSD的检测原理,重点阐述了采用二维PSD及透镜组合来实现平面中物体的位置测量。然后分析了影响PSD定位精度的主要因素并提出相应的解决方法。最后将PSD定位系统在三维中的应用推广进行了分析。
This paper summarizes the measuring principle of sensor PSD,and emphasizes the system for measuring the object's position on the plane that is based on PSD and lense.It analyzes the main factors affecting accuracy and puts forwards some suitable solutions.Finally,the application of PSD to precision measurement in three dimensional notion is analyzed.
出处
《东北电力学院学报》
2005年第2期46-49,共4页
Journal of Northeast China Institute of Electric Power Engineering
关键词
位置检测
二维PSD
三维运动
Detection of position
Two dimensional PSD
Three dimensional notion
