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纳米颗粒碰撞下的单晶硅表面原子形态 被引量:1

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摘要 应用分子动力学模拟了纳米颗粒与单晶硅(001)表面碰撞后反弹、飞离的现象,研究了入射角度对颗粒运动轨迹、基体损伤形貌的影响.随着入射角度的变化,颗粒反射角度在从钝角到锐角的大范围内变化.入射角度决定了嵌入到最低点时颗粒与基体的接触部位,作用于接触部位的基体释放弹性形变能提供了颗粒的反弹能量,从而形成纳米颗粒的反弹角度敏感依赖于入射角度的现象.碰撞使基体发生凹陷变形.与颗粒运动轨迹相对应,基体凹陷区域形状从较深的勺子形变化到平坦的圆弧形.部分位于运动颗粒前方的基体原子被推移出,在凹陷区边缘形成原子堆积.
出处 《科学通报》 EI CAS CSCD 北大核心 2005年第13期1417-1421,共5页 Chinese Science Bulletin
基金 国家重点基础研究发展规划项目(批准号:2003CB716201) 国家自然科学基金重大项目(批准号:50390062).
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参考文献15

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共引文献7

同被引文献34

  • 1徐进,雒建斌,路新春,张朝辉,潘国顺.超精密表面抛光材料去除机理研究进展[J].科学通报,2004,49(17):1700-1705. 被引量:23
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