腔体微扰法测厚度的分辨率和误差

The Resolution and Error of the Thickness Measurement by Microwave Cavity Perturbation

讨论了用微波腔体微扰方法测厚度的分辨率.计算及实验均表明,腔体微扰方法测量厚度具有高的分辨率(0.2μm),文中分析了整机产生误差的主要原因和减小误差的方法,指出扫频源的非线性对精度和稳定性的影响。

The principles of thickness measurement .and thiknees resolution of plastic film by microwave cavity parturbation were discussed. The calculated and experimental results showed that the thickness measurement with cavity perturbation had high resolution (0.2μm). The main causes of error were analysed and the methods of error reduction was examined. The dependence of accuracy and stability of instrument on the linearity of microwave sweep generator were discussed emphatically.