摘要
介绍一种能测量微机械结构振动频率的光纤振动传感器.较详细地介绍了该传感器的工作原理和结构特点,并对其线性检测范围进行了理论分析.这种传感器能检测振幅为1μm的振动.
An optic fibre vibration transducer which can be used to measure the vibration frequency of miniature mechanical structures is introduced. The operational principle and structural features of the transducer are described in detail. The linear measuring range of the transducer is analyzed theoretically. The vibration amplitude of 1μm can be measured by this transducer.
出处
《自动化仪表》
CAS
北大核心
1995年第5期15-17,共3页
Process Automation Instrumentation
