单源低能离子束辅助沉积类金刚石薄膜摩擦性能的研究

Tribological Properties of Diamond Like Carbon Film Prepared by Low Energy lon Beam Assisted Deposition with a Single lon Source

目前，制各类金刚石薄膜的方法很多，然而其中的多数在沉积过程中都需要基体具有比较高的温度，这就不可避免地会对耐温性能较差的材料造成损伤，或使机械零部件发生变形和尺寸变化．因此，利用单源低能离子束辅助沉积法制备了非晶碳薄膜，并且利用喇曼光谱和俄歇电子能谱研究了薄膜的结构，发现其为无定形的类金刚石薄膜，薄膜中的碳原子成键主要是ｓｐ２杂化键．研究表明，随着离子能量和束流的增大，薄膜的显微硬度、摩擦系数和寿命都增大．由于这种方法制备的类金刚石薄膜的含氢量较少，膜中ｓｐ２杂化键较多，性能更接近于石墨，故其摩擦性能较好．研究结果对深入认识类金刚石簿膜结构和在改进磁盘表面耐磨保护涂层等薄膜润滑性能方面，都具有重要的指导意义和实用价值。

At present time there are a lot of techniques being used to prepare diamond like carbon(DLC)film. However,many of them may increase the substrate temperature furthermore destroyits mechanical properties or cause the element dimension to be changed and deformed , especially to the materials with poor thermal resistance. In the paper presented here amprphous carbon film has been prepared by low energy ion beam assisted depostion with a singke uib source. Ramanspectroscopy and Auger electron spectroscopy have been used to investigate the structure of the film.The film proved to be DLC. Most of the bonds formed in the film were graphite bonds (SP￣2). Thefrction coefficient, life time and microhardness of the film increased as the ion energy and beamcurrent increased. This film contains a few hydrogen and a lot of sp￣2 bond.Its properties are similarto graphite,so that it has very good tribological performance. The results prove that DLC film hasgreat potential application in magnetic recording system as a wear resistance protecting film.