近场光显微镜的研究

STUDY ON NEAR-FIELD OPTICAL MICROSCOPY

近场光显微镜（ＮＦＯＭ）是一种高分辩率的扫描探针显微镜。通过对ＮＦＯＭ的发展、原理进行了论述，并提出了一个实用的ＮＦＯＭ系统，完成了从扫描检测到计算机采集处理以及图象处理分析的全部工作。应用该系统，成功地对光栅、玻璃等样品采集成象，并进行了一些分析。结果表明该系统分辨率达到１００ｎｍ以上，ＮＰＯＭ对非导体材料特别是生物材料有着广阔的应用前景。

Near Field Optical Microscope(NFOM ) is a kind of scanning probe microscopy with high resolution. In this paper, the theory and development of NFOM are reported. An experimental system is set up. The study from scanning detection, information collection to image processing is completed.With this system some kinds of images such as grade, fish scale plates and glass surface are obtained. The experimental results show that the system can give a resolution better than 100 mm. So it has a wide application for nonconductive materials and more specially for living materials.