Mo离子注入Al_2O_3的表面改性

An Invesugation of Mo Ions Implantation-induced Surface Modification in a-Al_2O_3 Ceramic

研究Ｍｏ离子注入Ａｌ＿２Ｏ＿３表面机械性能的变化及产生变化的原因，结果表明，Ｍｏ离子的注入，在Ａｌ＿２Ｏ＿３表面产生辐射损伤，使表面残余应力、表面硬度及断裂韧性提高；注入剂量Ｄ＞１×１０￣１７ｃｍ￣－２时，随着离子注入剂量增加，表层开始非晶化，导致表面残余应力及硬度下降，而断裂韧性仍继续得到改善。

The change of Mo ions implantation-induced surface mechanical property of a-Al_2O_3ceram-ic is sludied and the reasons of the change are analyzed.Mo ions implantation brings about surface ra-diation to be damaged and results in residul surface compressive stress,surface hardness,surface frac-ture-toughness increased.With ion dose increased,the surface layer turns amorphous,and the amor-phization results in a reduction of residual compressive stress and hardness,but surface fracture-toughness is still improved.