光谱连续的脉冲真空紫外（VUV）辐射源研究

STUDIES OF THE PULSED VUV RADIATION SOURCES WITH CONTINUOUS SPECTRUM

报道了一种光谱连续的真空紫外辐射源的设计和特性研究。为提高其辐射强度，辐射源设计在高气压、短脉冲状态工作。实验测得当充氢０．２～０．９ＭＰａ、极距０．４～０．８ｍｍ时，辐射源击穿电压为４～１０ｋＶ，脉冲宽度１．２～２．２×１０￣（－７）ｓ．与充氢压强、极间距有关，用Ｍｅｅｋ的击穿判据，理论计算了击穿电压，用放电通道膨胀理论，计算了放电脉冲宽度，发现两者都与实验基本相符。真空紫外辐射源的轴向光谱辐亮度，用一事先标定好的真空紫外光谱探测系统测量，其连续光谱辐射主要在１４０～１６０ｎｍ和１７５～２００ｎｍ两个区间，来源于氢分子辐射，其最大积分轴向辐亮度可达１１ｍＷ／Ｓｒ·ｃｍ￣２。

The design and the investigations of a new vacunm ultraviolet(VUV)radiation source with continuous spectrum are presented.For enhancing the continuous spectrum intensity,the VUV source is designed to work underconditions of high pressure(0.2～0.9MPa)and short pulses.It is found fromexperiments that the breakdown voltage of the VUV source with a filling gas ofhydrogen id about 8×10￣3 V and the pulse width 1 × 10￣(-7) sec,depending on thefilling gas pressure and the electrode separation. The breakdown voltage is alsotheoretically calculated by the Meek breakdown criterion,and the pulse width bythe discharge channel expansion theory,It is found that both are in reasonableagreement with the experimental results. The axial spectrum radiance of the VUV source is measured by a prior-calibrated VUV spectral detecting system,which consists of a VM-505 VUVmonochrometer,a sodium salicylate coating and a photomultiplier. It is foundthat the VUV radiation is mainly in the wavelength range of 140～160 nm and175～200 nm,which is identified as the hydrogen molecular radiation. Themaximum integral axial radiance obtained is about 11 mW/Sr·cm￣2.