大放气量小流导真空系统设计探讨

RESEARCH ON DESIGN OF GREAT OUTGASSINGRATES AND LOW CONDUCTION VACUUM SYSTEM

本文通过模拟电容器真空压力浸渍工艺放气实验，探讨了真空系统抽气性能受流导限制的特点。分析了大放气量状态下，真空系统压强变化与其对应抽气时间的特性并设计了满足电容器生产的单抽单注的真空压力浸渍工艺真空系统。

By way of simulating the test of outgassing rates in vacuum pressure impregnation technology of capacitor, the features of pumping of vacuum system limited by low conduction is discussed. For a great outgassing condition, the feature of the pressure varying throughout the pumping time of the vacuum system is analysed. This paper also designs a vacuum system used for pumping and impregnating for each capacitor to satisfy the capacitor producing.