单片式ZnO/Si SAW卷积器/相关器初探

Primary Research for Monolithic ZnO/Si SAW Convolvers/Correlators

声表面波(SAW)卷积器/相关器是扩频通信讯系统的关键部件。它可用作改善扩频通信系统信噪比的匹配滤波器元件。SAW卷积器/相关器还可用来消除雷达系统中的固有畸变和缩短处理时间,并能使其系统大大简化。本文叙述了制作在n型Si半导体基片上的单片式ZnO/SiSAW卷积器/相关器的设计、原理、结构、制作及其初步测试结果,并进行初略的讨论和提出改进性能的措施。

SAW convolvers/correlators are the important components in expanding spectrum communication system. It can be used as the matched filter device so as to improve the signal-to-noise ratio of the expanding spectrum communication system. It can also be used to the natural deformation of the radar system, shorten the processing time and simplify the system. In this paper, the design, principle, structure, fabrication and the, primary measurement are presented and the methods for improving its performance are proposed and discussed.