SSPA周边杂散光对响应度不均匀性的影响

Effect of the border stray light of SSPA on the photoresponse non-uniformity

根据实验现象，用半导体光电效应的基本原理，定性分析了自扫描光电二极管列阵（ＳＳＰＡ）周边杂散光对响应度不均匀性的影响。从装置和列阵结构上提出了相应的改进措施，有效地解决了列阵首尾部分二极管响应度的不均匀性。

From experments,the effects of the border stray light of self scanned photodiode array(SSPA) on the photoresponse non-uniformity have been analysed qualitatively,using the basic theory of semiconductor optoelectronic effect.The photoresponse non-uniformity of photodiodes in the both parts of the head and the tail of array has been solved effectively by modifying the set and the structure of array.