GaAlAs激光器腔面减反射涂层

Antireflective coatings on facets of GaAlAs laser cavities

通过对波长９１０ｎｍＧａＡｓ／ＧａＡｌＡｓ激光器谐振腔面蒸镀ＺｒＯ２膜的工艺过程，从理论和实验上分析了涂层特性，透射率由无膜时６２％提高到蒸镀膜后的９４％以上，提高了激光器的激光输出功率和工作寿命，对器件端面起到了保护作用。

The properties of coatings have been analysed theoretically and experimentally throughout the deposition process of ZrO2 films on facets of GaAs/GaAlAs laser cavities with a wavelength of 910nm.The transmissivities of cavity facets have been increased from 62% without coatings to above 94% with coatings.The output power and operating lifetime of Lasers have been improved and the protective effect to laser facet was obtained.