集成硅微机械光压力传感器

Integrated micro-mechanical silicon optical pressure sensor

介绍了一种新颖的集成硅微机械光压力传感器的结构、工作原理、制造工艺和实验结果。该传感器是利用半导体集成电路微细加工技术和各向异性腐蚀相结合的方法，将传输、获取信息的光波导，敏感弹性硅膜和光电探测器集成在一块三维硅基片上得到的。它具有灵敏度高、抗干扰能力强、自身无需电源、防爆、成本低和可靠性高等优点。

A novel integrated micro-mechanical silicon optical pressure sensor is presented. Using the silicon anisotropic etching technology and the standard IC process,the wave guide for transmissing optical signal,the thin membrane as sensitive element and the photoelectric detector are all integrated in a silicon chip.The sensor structure,principle and process are introduced. This novel integrated micromechanical silicon optical pressure sensor is so small,reliable,high sensitivity,inexpensive and needless to have electrical supply that it may be very useful in many applications.