微型多道成像光谱分析系统集成化的探索

Research on the miniaturized multi-channel imaging spectrum analytical system

提出用微机械技术和常规半导体集成电路微细加工技术将庞大复杂的多道成像光谱分析系统集成化和微型化的新思想。研究了微型多道成像光谱分析系统的基本结构、工作原理和主要的制作方法。讨论了实验分光系统、成像系统和高灵敏度探测器列阵混合集成在一块三维硅基片上的初步方案。

A new idea is presented that how a large complex multichannel spectrum analyzing system can be integrated and miniaturized using micromachine technique and normal semiconductor integrated circuit technology.The basic structure,operating principle and fabrication are also studied.An initiative scheme is given to integrate the spectrometer,imaging system and high sensitivity photodiode array in a three dimension silicon chip.