7ROMANIA Nando Kaminski. State of the art and the fu- ture of wide band-gap devices. 2009 EPE 13th European Conference on Power Electronics and Applications. Bre- men, Germany: Otto-Hahn-Allee, 2009: 1-9.
8WILLARDSON R K. SiC Materials and devices, semicon- ductors and semimetals[M]. New York: Academic Press, 1998.
9Di Gao, Muthu B J Wijesundara, Carlo Carraro, et al. Recent progress toward a manufacturable polycrystalline SiC surface micromachining technology. IEEE Sensors J, 2004,4 (4) :441.
10Whitmarsh C K,Interrante L V. US Pat,5153295. 1992-10-06.
