摘要
矩形场限环在器件反偏时的最大电场总是集中于四角，因而求解柱坐标下极角α不变的泊松方程可使场限环三维电场分布的讨论大为简化．在此基础上用有限元法对三场环结构的电场分布进行模拟，并对结构参数进行了优化分析．环电位随外加电压而变化的模拟结果与实验结果相吻合，表明了简化模型和分析方法的正确性和实用性．
Abstract The maximum electrical field in a reversely biased PN junction equiped with rectangular field limiting rings is always concentrated on the constantly oriented corners. The 3D distribution of electrical field in the system can be easily calculated in a cylindrical coordinate system simplified by setting the polar angle constant. Characteristics simulation and parameter optimization have been carried out in a finite element numerical computing program for a multirang system. The reasonability and the effectiveness of the model and the mtnod employed here are testified by the agreement between simulation and experiments of the ring potential distributions under varied applied voltage conditions.
