摘要
本文研究一种用ＺｒＯ２，ＳｉＯ２，Ｎｂ２Ｏ５和Ｐ２Ｏ５为原料的半导陶瓷湿度传感器．它的组分是用扫描电子显微镜，Ｘ射线衍射仪和Ｘ射线能谱仪进行分析．几种氧化物粉末在高温下烧结成由许多微小晶粒组成的多孔半导陶瓷．晶粒周围环绕着Ｎｂ（０．２）Ｚｒ（０．８）Ｏ（２．１），ＺｒＮｂ（１４）Ｏ（３２），ＺｒＰ２Ｏ７以及Ｎｂ（４４）Ｐ２Ｏ（１１５）复合物．这些固溶体能够降低晶粒之间的电阻．大气水分子的吸附和毛细凝聚进一步加强了传感器电导．
Abstract A semiconductive ceramic moisture sensor using ZrO2, SiO2,Nb2O5 and P2O5 as raw materials is studied. Its component is analysed by means of Scanning Electron Microscope, X-ray Diffractometer, X-ray Energy Spectrometer. The fine oxide Powders are sintered at a high temperature to form the porous semiconductive ceramic body consisting of many microcrystalline particles. The particle is surrounded by some complex oxides:Nb0.2Zr0.8O2.1, ZrNb14O32, ZrP2O7 and Nb44P2O115. These solid solutions can decrease the resistance between the microcrystalline particles. The absorption and the capillary condensation of atmospheric water moleculae further enhance the admittance of the semiconductive ceramic moisture sensor.
