圆柱度计量标准的纳米级评定

Nanometer Magnitude Evaluation of Cylindricity Measuring Standard

探讨了圆度、圆柱度计量标准的纳米级评定方法．分析并验证了在测量安装的下、上截面偏心量分别不大于１μｍ和２μｍ时，对圆柱度误差采用线性化模型及Ａｂｄｅｌｍａｌｅｋ算法的二元最佳一致逼近评定方法，可满足纳米级评定精度．提出了合理而直观表示圆柱度误差最小包容区域及其极点分布的轴线定位展开图和可旋转三维投影图，并已编制成整套评定软件．同时拟定出检定该评定软件可靠性、分辨力和精确度的检定方法．

The method of nanometer magnitude evaluation of roundness and cylindricity measuring standards is studied. It has for verified that when the eccentricities of the low-section (datum plane)and up-section of measurement are set up at less than 1μm and 2μm respectively, the 2D best uniform approximation evaluation method of cylindricity using the linearized model and Abdelmalek algorithm can satisfy the precision required with the nanometer magnitude. Also the axis positioning expansion graph and the method of rotatable 3D projection are proposed to represent the cylindricity error curve, minimum sone and it's extreme points rationally and vividly. Meanwhile a complete set of cylindricity evaluation software has ho worked out, and verified results of this software show that the reliability, resolution and accuracy are in accord with requirements of nanometer magnitude evaluation of cylindricity.