电磁聚焦成象系统中曲轴宽电子束聚焦的象差理论

Aberration Theory for Wide Electron Beam Focusing Having Curvilineal Optical Axis in Electro-Static and Magnetic Imaging Systems

在宽电子束聚焦理论基础上，利用非正交旋转曲轴坐标系，研究了电磁聚焦成象系统的曲轴象差理论．采用象差积分函数形式，导出了二级几何象差、主轨迹色球差和曲近轴色球差的象差系数，使结果适宜计算机处理．本文结果已用于实际电磁聚焦成象系统的设计计算．

Based on the generalized theory of wide electron heam focusing, an aberration theory for wide electron beam focusing with curvilineal optical axis in electrostatic and magnetic imaging systems has ho studied using the rotational and non-orthogonal curvilineal coordinate systems. By defining the integration function, all aberration coefficients of the second-order geometrical aberration, the principal trajectory chromatic aberration and curvilineal paraxial trajectory chromatic aberration are given. The results of this paper have ho shown to be convenient for analysis and computer processing.