摘要
介绍了表面技术领域中应用等离子技术的诸种现代工艺及其工作原 理;讨论了等离子体在这些工艺过程中的行为作用,由其引发形成的工艺与产品的特点,以及这些工艺的应用发展前景。
Some modern technologies of surface finishing using plasma and their working principles were introduced. The behavior and role of the plasma in these processes and the characteristics of the technologises and their products were indicated. The Application and development of these technologies was discussed.
出处
《表面技术》
EI
CAS
CSCD
1995年第1期1-5,共5页
Surface Technology