真空镀铝镜玻璃前处理分析

Analysis about Prerinsing of Glass Used for Vacuum Deposition Al Mirror

真空镀铝镜玻璃前处理分析胡季平（甘肃省科学院自然能源研究所７３００００）ＡｎａｌｙｓｉｓａｂｏｕｔＰｒｅｒｉｎｓｉｎｇｏｆＧｌａｓｓＵｓｅｄｆｏｒＶａｃｕｕｍＤｅｐｏｓｉｔｉｏｎＡｌＭｉｒｒｏｒ￥ＨｕＪｉｐｉｎｇ（ＮａｔｕｒａｌＥｎｅｒｇｙＲｅｓｅａ...

The remainder on glass surface after prerinsing has been analysed by using gas chromatography and the amount of remainder after rinsing by two typical rinsing liquidshas been compared eanh other in this paper. A new concept of minimum effective limitation of rinsing liquid concentration and its determination was proposede. This method can also determine the refresh time of rinsing liquid. The pinholes of mirror surface have been analysed by using SEM and X-ray photoelctron spectroscope(XPS). The data show that Al_2O_3 dust contaminates clean glass surface in vacuum chamber and this second contamination is the main reason of pinhole formation. To keep the chamber lean can reduce pinholes dramaticaly.