摘要
简要介绍了金刚石薄膜的发展史,着重叙述了金刚石膜在机械、光学、声学和半导体方面的一些应用,指出了金刚石膜在今后的研究和商品化过程中所要遇到的一些问题。
This paper briefly intrduces the development history of thediamond thin films, emphatically narrates their applications in machinery, optics, acoustics and semiconduct, points out problems which will appear in the studying and commercializing process of the diamond thin films.
出处
《材料导报》
EI
CAS
CSCD
1995年第5期33-36,共4页
Materials Reports
关键词
金刚石薄膜
应用
薄膜
diamond thin films,application
