溶胶－凝胶工艺参数对（Pb，La）TiO_3薄膜结构的影响

The Effect of Sol-Gel Processing Parameters on the Structure of(Pb,La)TiO_3 Thin Films

系统地研究了溶胶－凝胶（Ｓｏｌ－Ｇｅｌ）方法制备（Ｐｂ_（１－Ｘ）Ｌａ_ｘ）Ｔｉ_（１－ｘ／４）Ｏ_３（简称ＰＬＴ）薄膜时催化剂（或ｐＨ值）、溶液浓度在室温下对形成溶胶和凝胶的影响规律，用Ｘ射线结构分析和ＳＥＭ研究了热处理工艺对薄膜结构及晶粒尺寸的影响。实验表明，浓度、醋酸含量都存在一个最佳的范围，且随铜（Ｌａ）含量的增加，该范围减小；实验还发现，随着Ｌａ含量的增加，薄膜的晶化温度降低。在单晶（１００）Ｓｉ衬底上成功地制备出了具有钙钛矿型结构、厚度约为２００ｎｍ、均匀、致密、无裂纹的ＰＬＴ晶态薄膜。

he influence of catalyst and solution concentration on the formation of (Pb_(1-x) La_x ) Ti_(1-x/4) O_3(PLT ) Sol and Gel at the room temperature were studied systematically and the effect of the sintering tem-perature on the crystallization and the grain size of thin films were investigated by X-Ray diffraction and SEM analysis It was shown that clear sol and transparent gel were formed only with appropriate range ofacetic acid content and solution concentraction,which reduced with increasing content of La. It was found that the crystallization temperature of thin films lowered with an increase of the La content Uniform and crack-free PLT thin films with perovskite structure were obtained on(100) Sisingle Crystal substrate. The thickness of thin films is about 200nm.