PLZT（28／0／100）薄膜的溶胶－凝胶制备技术及显微结构

SOL-GEL PREPARATION TECHNIQUE AND MICROSTRUCTURE OF PLZT(28 / 0 / 100) THIN FILMS

用溶胶—凝胶技术及回旋法，在石英玻璃和单晶ｓｉ基片上制备ＰＬＺＴ（２８／０／１００）多晶薄膜；在ＳｒＴｉＯ３和α－Ａ１２Ｏ３单晶基片上外延生长择优取向薄膜．其外延关系分别为（１００）ＰＬＺＴ（２８／０／１００）／／（１００）ＳｒＴｉＯ３和（１００）ＰＬＺＴ（２８／０／１００）／／（０００１）Ａｌ２Ｏ３．用ＩＲ，ＸＲＤ．ＲＨＥＥＤ，ＳＥＭ和ＳＩＭＳ分析凝胶中杂质、凝胶的分子结构和薄膜的显微结构．结果表明，用溶胶—凝胶技术能制备出显微结构良好的多组份陶瓷薄膜．

LZT(28 / 0 / 100) polycrystalline thin films (PLT 2B for short) on quartz glass and p-(1 1 1) Si substrates have been prepared by spinning method, the preferential oriented thin films of epitaxial growth on SrTiO3 and α- A12O3 single crystal substrates have been prepared too, the epitaxial relations are respeCtively (100) PLT28 / / (100) SrTiO3 and (100) PLT28 / / (0001l) Al2O3; these thin films were transformed into crystalline with perovskite structure after heat treatment at 900℃ for 3 h. The microstructure of the thin films were analysed by IR, XRD, RHEED SEM and SIMS etc. The results show that the polycrystalline thin films with good microstructure can be prepared by sol-gel technique and spinning method. If under the condition of preferential process parameters, the preferential oriented thin films of epitaxial growth can be also prepared on the proper substrates.