摘要
用１００×１００ｍｍ大面积加热器进行了气相生长金刚石膜试验，对得到的金刚石膜样品作了拉曼光谱分析，并用扫描电镜观察了不同空间区域中金刚石形核的特点．拉曼光谱和扫描电镜观察的结果，均给出了与温度分布特点较好的对应．本研究的结果，指出厂热丝法大面积气相生长金刚石膜工业应用的可能性．
The large area temperature field was formed through large area planary arrangment of parallel W filament arrangment. and the temperature distribution of temperature field was measured. The results have shown that an uniform temperature region of 70×70mmwith the maximum temperature fluctuation no more than 50℃ can be formed by a 100×100mm tungsten filamentary heater. The diamond film was deposited on an area of 100×100mm. The obtained film was analysized by Raman Spectra.SEM was used to observe the morphology of the diamond film in different regions. The features of diamond film morphology on substrates in different regions can be correlated with the variation of temperature field. The possibility of large area deposition of diamond film on industry application has been pointed out.
出处
《材料研究学报》
EI
CAS
CSCD
1995年第3期245-249,共5页
Chinese Journal of Materials Research
基金
国家自然科学基金
