溶胶—凝胶法制备的Al_2O_3感温膜及其性质

THE PROPERTIES OF Al_2O_3 HUMIDITY-SENSING THIN FILM PREPARED BY SOL-GEL METHOD

用溶胶—凝胶方法，采用电泳工艺在Ａｌ基片上制成Ａｌ２Ｏ３薄膜．膜物质主要是非晶态，但含有少量微晶．随着热处理温度的升高，进晶含量增加，这种湿敏膜在中，高湿区有良好的感湿性能．

Using sol-gel method. Al2O3 thin film have ben prepared on Al wafer with electrophoretic technique. The principal parts of the films are non-crystalline solid.and there are a little small crystallites in the films.The amount of crystallites increases with the increase of heat-treatment temperatures. The films have a good humidity-sensing property at high and middle humidity-region.