火焰法沉积金刚石薄膜过程中碳在基底中的行为

THE BEHAVIOR OF THE CARBON IN THE SUBSTRATE DURING DEPOSITING DIAMOND FILM BY COMBUSTION FLAME

采用火焰法在Ｍｏ基底上沉积金刚石薄膜，研究了在沉积过程中Ｃ在Ｍｏ基底中的行为．结果表明，在Ｍｏ基层上沉积金刚石时，碳原子与Ｍｏ反应形成Ｍｏ２Ｃ，随着时间延长，Ｍｏ２Ｃ层加厚，Ｃ原子扩散进入基底的速率下降，之后Ｃ原子在Ｍｏ２Ｃ层表面达到过饱和开始金刚石形核．

The diamond films were deposital on the Mo substrates by combustion name in air. The behavior of the carbon was investigated during depositing diamond films. The results show that firstlly the carbon atoms are absorbed on the surface of the substrate, secondlly the carbon atoms diffuse into the substrate and react with Mo to form Mo2C, finally the Mo2C layer becomes more thick with increasing time, then the diffusing rate of carbon atoms in the substrate becomes lower so that the diamond nucleation takes place because the carbon atoms is oversaturated.