二氧化碳薄膜微电极器件的制作及其特性研究

Fabrication of the CO_2 Thin-film Microelectrode Devices and its Performance Characteristics

提出一种用微细加工技术构制的二氧化碳薄膜微电极器件.这类器件具有常规微电极所特有的全部优点,而且结构紧凑,便于集成化.用作电流型二氧化碳气敏器件,在室温下有良好的工作特性:响应电流在整个CO_2浓度范围内呈线性,并通过原点;90%响应时间约30s;连续工作6h性能稳定,重现性好.

An amperometric carbon dioxide thin-film microelectrode devices produced byusing microfabrication techniques is presented in this paper. The assembly contain threecoplanar thin-film electrodes deposited on a SiO2/Si wafer substrate. A disk-shaped Ptmicroelectrode in the center of the assembly serves as the working (sensing) electrode,and the outer two electrodes are a Pt counter electrode and a Ag/AgCl reference elec-trode. Such micro fabricated amperometric devices exhibit all the advantages which con-ventional microelectrodes offer in the field of electroanalysis and show good responsecharacteristics for direct amperometric determination of CO2 in the gas phase at roomtempeature: good linearity over the entire CO2 coocentration range, 90% response timeof 30s and high reproducibility over a period of 6 h of continuous operation.