摘要
介绍用集成电路微细加工技术研制出的一种新型超薄平面结构的电涡流传感器探头.用理论模拟对线圈半径与绕向进行设计,并配制了适宜的二次电路,制造出微位移测试仪样机.同传统结构的电涡流传感器探头相比,灵敏度提高了16%,线性度改善2%.
A sample of micro-shift measuring apparatus has been developed, the probeof which is a film coil fabricated with integrated circuit micro-processing technology.The device of the film coil is optimized basing on theoretical simulation, equiped withappropriate secondary circuit. Its sensitivity is increased by 16% and linearity is im-proved by 2%, comparing to traditional one.
出处
《传感技术学报》
CAS
CSCD
1995年第3期35-38,共4页
Chinese Journal of Sensors and Actuators
