TAA薄膜NO_2气敏元件的特性研究

A Study of the Properties of NO_2 Gas-sensor Based on TAA Thin Films

用真空升华方法制作了ＴＡＡ薄膜ＮＯ２气敏元件，并研究了其室温条件下的响应特性．结果表明：该元件在室温下对ＮＯ２具有较高的灵敏度，可检测空气中含１×１０（－６）的ＮＯ２气体．该元件在１．７×１０（－６）～１７×１０（－６）浓度范围内对ＮＯ２呈线性响应，响应时间在３０ｓ内，恢复时间为几分钟的数量级。

A NO2 gas-sensor based on TAA thin films was prepared by vacuum sublimation. And its properties of the response to NO2 at room temperature were studied. The results indicated that the sensor has a reletively high sensitivity to NO2 gas, and can detect 10×10(-6) of NO2 gas in air. The response is linear to NO2 in the range 1.7×10(-6)￣17×10(-6). Thm response times of less than 30s and recovery times of the order of some minutes are observed.