400MPa压阻式压力传感器

400MPa F. S. Fiezoresistive Pressure Transducer

采用高强度合金膜片作为初始敏感元件来承受被测压力，再利用硅油将压力传递到压阻敏感元件上，经硅油传递后的压力要比被测压力小很多，从而可用低量程的压阻元件制成超高压力传感器。基于此原理，本文采用量程为２ＭＰａ的压阻元件，研制成了４００ＭＰａ量程的超高压力传感器。

Using high intensity alloy film as initial sensing element to endure the measured pressure, and silicon oil to translate the pressure to piezoresostive sensing element.After that, the measured pressure becomes very much smaller than the initial value, so can use low scale piezoresistive element as sensing elements to make extra high pressure transducers. This thesis is about using F. S. 2MPa piezoresistive elements as sensign elementsto make F. S. 400MPa extra high pressure transducers.