薄膜型TiO_2氧传感器响应时间的测试与研究

Measurement and Study of Response Time of TiO_2 Thin Film Oxygen Sensors

讨论了氧分压测试的原理、方法，利用计算机实现了数据采集自动化．用Ｓｏｌ－ｇｅｌ方法制备出了薄膜型ＴｉＯ２氧传感器，并对传感器的响应时间进行了测试与分析，发现温度和催化剂对其响应时间有很大的影响．

The principles and methods of measurement of oxygen partial pressure were discussed. Data collecting was automatized by using a computer.The response time of TiO2 thin film oxygen sensors prepared by Sol-gel technique was measured and analyzed. It was found that temperature and catalyst had an important influence on the response time.