常温静电封接技术的研究与实验尝试

The Research and Experiment of Room Temperature Anodic Bonding

根据静电封接的机理，配制了一种低温玻璃作为封接材料，初步完成了常温下的静电封接实验。

According to the mechanism of anodic bonding, we made a kind of low melting point glass for bonding material, and have preliminarily finished room temperature anodic bonding experiment.