分辨率高达0．0005℃的新型水晶谐振式温度传感器

A New Type of Piezoresonance Quartz Temperature Sensors for the 0.0005℃ Measuring Resolution

探讨了采用厚度切变Ｃ模式的新型水晶温度传感器优化设计法。该传感器使用切型、平凸结构谐振器、５ＭＨｚ频率工作。实测数据表明，它具有超高灵敏度和良好的线性特性，其分辨率为０．０００５℃，线性度为０．０７℃。

A optimum design method of a new type of piezorsonance quartz temperature sensors using thickness shear c-mode is discussed. The crystal sensors consist of -cut crystal plates with plano-comex of the major surfaces which they are designed at 5MHz of frequency. Experimental data show that they are the temperaure sensors with ultra-high sensitivity and linearity. Measurement of 0.0005℃ temperature resolution and 0.07℃ linear frequency-temperature respones has been made.