千瓦级CO激光器实时测控系统研究

Study of real-time measure-control system in high power CO laser

将ＤＯＳ内存驻留技术应用于实时测控系统中，较好地解决了实时测量与实时控制之间的矛盾．温度测量，采用高精度恒流源偏置下的铂电阻作为探测传感器．实验表明，铂电阻测温具有良好的线性及较强的抗电磁干扰的能力；但受其响应速度的限制，其测量值与实际值之间存在一定的滞后，分析表明，这一滞后效应，在激光器稳定运行时可以忽略，并可以将测量误差限制在１％以内．气体流速控制，采用微机控制高性能马达变频调速器实现对真空室中风机控制，进而达到调整气体流速的目的．此实时测控系统的研制，保证了激光器稳定、高效率的运行．

The contradiction between real-time measure and real-time control is solved by usingTSR (Terminate and Stay-Resident Utility)techniques of DOS(Disk Operation System)in thereal-time measure control system. Measuring resistances,platinum,working by the highaccuracy continuous current are used as temperature measure sensor. Experiments show,thismethod has good linearity and resistance for electromagnetic disturbance. But under the bound ofresponsive velocity, somewhat delay exists between the measure value and the real value.Analyses show,this delay effect can be neglected when the laser runs stable and can restrict themeasure relative accuracy by one percent.Controlling motor,through computer controlSANKEN,can adjust the motor speed.This system is sufficient for the stable,high efficientlaser.