摘要
本文报道了钽掺杂钌基厚膜电阻制备过程中导电相和玻璃相颗粒尺寸效应的实验研究结果。当导电相和玻璃相颗粒尺寸分别达到25和50nm时,电阻阻值和电阻温度系数也随之发生显著变化,并尝试根据厚膜电阻导电机理对其产生的原因进行定性的分析。
This paper reports the particle size effect on the resistance and TCR of Ta-doped Ru-base thick film resistor, which occurs when the particle sizes of two phases reach critical values (conductive phase ≈ 25nm, glass phase ≈ 50nm). And it can be explained qualitatively with the conduction mechanism of thick film resistor.
关键词
Liao基厚膜电阻
颗粒尺寸效应
混合集成电路
Ru-base thick film resistor, Particle size effect, Conductive mechanism of thick film resistor, Temperature coefficient of resistance
